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  • Mitsubishi Electric Corp. Orders More Reactors from Aixtron
May 2001
AACHEN, Germany, May 11 -- Aixtron AG has received a repeat order for an AIX 2400G3 MOCVD Planetary Reactor from Mitsubishi Electric Corp. in Itami, Japan. The purchase of this AIX 2400G3 MOCVD production system, with an EpiRAS advanced in-situ characterization module included, will enable the Mitsubishi R&D group to develop new device structures for high quality lasers with a fast transfer to the production department.
    "With the AIXTRON Planetary Reactor system our R&D group can fully concentrate on the investigation of new materials and the development of new products with ever growing complexity and necessity of stricter process control," said Dr. Yutaka Mihashi, chief engineer and leader of the epitaxy R&D group of Mitsubishi. "We are in the fortunate situation to purchase a multiwafer system, which will help us to further reduce the lead time from R&D level to mass production. The deciding factors have been good results achieved on our initial AIXTRON systems as well as the possibility to use most advanced in-situ measurement equipment like the EpiRAS. This strategy will guarantee a higher degree of process control in production combined with cost minimization".

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