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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Fringe Technology Benefits Interferometric Lithography

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Daniel C. McCarthy

Like the circuitry on integrated chips, the periodic stripes etched on laser diodes are shrinking. It is intuitive that reducing feature dimensions is simply a matter of reducing the illumination wavelength of a lithography laser. However, operating at shorter wavelengths has never been a trivial task, and decreasing them further won't be so easy. One alternative is to apply the evanescent near-field region of light to interferometric lithography techniques used to produce the periodic stripes on distributed feedback and distributed Bragg reflector laser diodes. As reported in the April...Read full article

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    Published: July 2001
    Basic ScienceindustrialResearch & TechnologyTech Pulse

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