Semiconductor lithography systems provider ASML Holding NV of Veldhoven, the Netherlands, will acquire its light source supplier Cymer Inc. of San Diego for €1.95 billion (about $2.5 billion) in stock. The deal will accelerate the development of extreme-ultraviolet (EUV) semiconductor lithography technology. ASML and Cymer have collaborated for more than a year on the development of EUV technology. Cymer will operate as an independent division and as the deep-ultraviolet and EUV light source center of ASML. Cymer’s products have applications in medical devices. The transaction is expected to close in the first half of 2013.