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Gigaphoton Reaches Milestone

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Lithography light source manufacturer Gigaphoton Inc. has shipped its 1000th excimer laser for semiconductor photolithography.

Komatsu, Gigaphoton’s predecessor, marketed Japan’s first excimer laser in 1985, followed by the world’s first excimer laser for semiconductor photolithography in 1987. Since then, Gigaphoton has developed and marketed excimer laser units that pursue finer resolutions, higher throughput and lower running cost to meet the needs of the semiconductor industry.

Gigaphoton’s next-generation ArF excimer laser for multipatterning immersion lithography scanners, the GT63A series, was created to meet customers’ needs for reducing running cost, and for achieving higher uptime, wider depth of focus and higher stability.

For more information, visit: www.gigaphoton.com  
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Published: December 2011
Glossary
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer geometric patterns from a photomask or reticle to a photosensitive chemical photoresist on a substrate, typically a silicon wafer. The basic steps of photolithography include: Cleaning the substrate: The substrate, often a silicon wafer, is cleaned to remove any contaminants from its surface. ...
ArF excimer laserAsia-PacificBusinessexcimer lasersGigaphotonGT63A seriesindustrialJapanlight speedlithographylithography light sourcesmultipatterning immersion lithography scannerphotolithographysemiconductor photolithographyLasers

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