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Fraunhofer, NextIn Collaborate on Wafer Inspection System

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The Fraunhofer Institute for Photonic Microsystems (IPMS) and NextIn Inc. of South Korea have entered into a collaborative relationship for the evaluation of a defect inspection system.

Aegis I Defect Inspection Tool
The user interface of the Aegis I Defect Inspection Tool. Courtesy of Fraunhofer IPMS.


As part of the one-year effort, the NextIn Aegis I Wafer Inspection System will be evaluated in the cleanroom at Fraunhofer’s Center Nanoelectronic Technologies (CNT).

The Aegis I combines bright-field and dark-field imaging for the visual detection, automatic classification and characterization of defect types on structured wafers ranging from 200 to 300 mm.

This type of equipment is important for the research and development of front-end- middle- and back-end-of-the-line processes, said Dr. Benjamin Uhlig, head of the Interconnects group at IPMS-CNT.

For more information, visit www.fraunhofer.de.
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Published: January 2015
Glossary
machine vision
Machine vision, also known as computer vision or computer sight, refers to the technology that enables machines, typically computers, to interpret and understand visual information from the world, much like the human visual system. It involves the development and application of algorithms and systems that allow machines to acquire, process, analyze, and make decisions based on visual data. Key aspects of machine vision include: Image acquisition: Machine vision systems use various...
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