Search
Menu
PI Physik Instrumente - Revolution In Photonics Align ROSLB 3/24

Eulitha to Provide Photolithography System for Chinese Institute

Facebook X LinkedIn Email
Lithography equipment developer Eulitha AG has received an order for its PhableR 100 photolithography tool from the Changchun Institute of Optics, Fine Mechanics and Physics in China. Terms of the sale were not disclosed.

The PhableR 100 will be installed at the National Key Laboratory of Applied Physics, where research topics include crystal optics, micro and nano devices and systems, shortwave optics, optical information integration, information security, space optics, and remote sensing.

The system incorporates displacement Talbot lithography technology, allowing researchers to print periodic patterns with feature sizes below 150 nm without severely limiting flatness or conductivity requirements.

Eulitha specializes in the development of lithographic technologies for applications in the optoelectronics and photonics fields. It is a spinoff of the Paul Scherrer Institute in Villigen.

For more information, visit www.eulitha.com.
DataRay Inc. - ISO 11146-Compliant

Published: August 2015
Glossary
photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer geometric patterns from a photomask or reticle to a photosensitive chemical photoresist on a substrate, typically a silicon wafer. The basic steps of photolithography include: Cleaning the substrate: The substrate, often a silicon wafer, is cleaned to remove any contaminants from its surface. ...
optoelectronics
Optoelectronics is a branch of electronics that focuses on the study and application of devices and systems that use light and its interactions with different materials. The term "optoelectronics" is a combination of "optics" and "electronics," reflecting the interdisciplinary nature of this field. Optoelectronic devices convert electrical signals into optical signals or vice versa, making them crucial in various technologies. Some key components and applications of optoelectronics include: ...
BusinessOpticsEuropeSwitzerlandEulithaChangchun Institute of Optics Fine Mechanics and PhysicsChinaAsia-PacificCIOMPphotolithographyoptoelectronicslight speed

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.