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14 terms

Photonics Dictionary

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photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...
excimer laser
An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term excimer is derived from excited dimer, reflecting the nature of the gain medium...
fused quartz and silica
Fused quartz and silica are closely related materials, both composed primarily of silicon dioxide (SiO2), but they are produced through different manufacturing processes and have distinct properties...
mask
1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture tube. 2. In photolithography, a photomask (or mask) is typically a patterned...
mask proximity correction
A technique used in photolithography of computer chips to compensate for errors caused by the proximity effect, which results in variations in size between areas of the mask that have many small...
masks for evaporation/deposition
In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...
micro-optics
Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level. These components are miniaturized optical elements that manipulate light at a...
phase mask
In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...
photoemulsion
In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.
photomask
A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...
photoresist
Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....
proximity effect
The underexposure caused by the diffraction of light passing through small openings spaced closely together in masks used in photolithography.
rare gas halide laser -> excimer laser
An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term excimer is derived from excited dimer, reflecting the nature of the gain medium...
wafer
In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the...
Photonics Dictionary

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