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  • surface profile A representation of the shape of a surface, including any roughness or other irregularities. The profile can be generated by direct measurements, as by a stylus, or by remote measurement, as by an interferometer.
  • interferometer An instrument that employs the interference of lightwaves to measure the accuracy of optical surfaces; it can measure a length in terms of the length of a wave of light by using interference phenomena based on the wave characteristics of light....
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