Full company details
PI (Physik Instrumente) LP
Sub. of Physik Instrumente (PI) GmbH & Co. KG
Motion Control, Air Bearings, Piezo Mechanics
16 Albert Street
Auburn, MA 01501
United States
Phone: +1 508-832-3456
Fax: +1 508-832-0506
Piezo Scanner
Photonics Spectra
Dec 2016Based on a parallel-kinematic design, the P-616 NanoCube XYZ piezo scanner from Physik Instrumente LP is a redesign of the P-611 3D positioning stage.
The device features one lightweight moving platform for all three axes, high precision and dynamics in a compact package. It is the company’s smallest and lightest system with capacitive feedback delivering 100-µm travel range. The XYZ stage is driven by ceramic-encapsulated, preloaded PICMA piezo actuators that provide better performance and reliability than conventionally insulated piezo actuators.
Applications include photonics alignment, microscopy, 3D imaging, screening, surface analysis and wafer inspection.
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