Introducing the Nanotech Fast Tool Servo with NanoCAM Freeform programming software. The NFTS-6000 is a single-axis fast tool servo with 6 mm of travel. The system incorporates porous air bearings and is driven with voice coil motors. The feedback system uses a linear scale with subnanometer resolution and it has a 1-nm programming resolution. The fast tool servo can be integrated on the Nanotech 250UPL, 350FG and 450UPL. The NFTS-6000 utilizes a Z-wedge stage under the FTS unit with +/- 2.58 mm of travel, and an adjustment resolution of 0.14 µm/degree. It uses insert type diamond tools and can accept two tools simultaneously. The NFTS-6000 is programmed with NanoCAM, an advanced CAM software package for ultraprecision optical machining of 3-D freeform surfaces. Optical surfaces are created in NanoCAM using a wide variety of predefined mathematical functions based on optical equations, a cloud of data points, or standard CAD formats.