Search
Menu
DataRay Inc. - ISO 11146-Compliant Laser Beam Profilers
Photonics Dictionary

optical emission spectroscopy

In dry etching, a method of characterizing the composition of solid materials such as metal. Atoms in the OES technique are excited by energy that comes from a spark formed between the sample and an electrode. This energy emits light, which can then be converted into a spectral signal. The intensity recorded at the peaks of this spectral signal produce accurate material composition analysis.
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.