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Photonics Dictionary

scanning electron microscopy

Scanning electron microscopy (SEM) is an advanced imaging technique used in microscopy to obtain high-resolution, three-dimensional images of the surfaces of solid specimens. SEM achieves this by using a focused beam of electrons to scan the specimen's surface, resulting in detailed images with magnifications ranging from about 10x to 100,000x or higher.

Key features and principles of scanning electron microscopy include:

Electron beam: SEM uses an electron beam instead of visible light for imaging. Electrons have much shorter wavelengths than light, allowing for significantly higher resolution.

Electron source: A high-energy electron source, typically a tungsten filament or a field-emission gun, generates the electron beam.

Electromagnetic lenses: Electromagnetic lenses are used to focus and control the electron beam, allowing for precise imaging of the specimen.

Scanning coils: Scanning coils direct the focused electron beam in a raster pattern across the specimen's surface. The interaction of the beam with the specimen produces various signals.

Detectors: Different detectors are employed to capture various signals resulting from the electron-specimen interaction. These signals include secondary electrons, backscattered electrons, and characteristic X-rays.

Image formation: The detected signals are used to create detailed images of the specimen's surface. Secondary electron images provide topographical information, while backscattered electron images reveal compositional differences.

Three-dimensional imaging: Although SEM produces two-dimensional images, by tilting the specimen and acquiring images from different angles, researchers can generate stereoscopic or three-dimensional representations of the sample's surface.

SEM has diverse applications in various scientific fields, including materials science, biology, geology, and nanotechnology. It is especially valuable for examining the surface morphology, structure, and composition of materials at a micro to nanoscale level. The technique's ability to provide detailed information about surface features makes it an essential tool for both research and industrial applications.

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