Photonics Dictionary

An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and research laboratories to pattern extremely fine features with sub-micrometer...

Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of...

1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture tube. 2. In photolithography, a photomask (or mask) is typically a patterned...

A technique used in photolithography of computer chips to compensate for errors caused by the proximity effect, which results in variations in size between areas of the mask that have many small...

Instrument that uses absorption spectroscopy to detect gases in planetary atmospheres. Dispersed incoming radiation is transmitted to one or more sampling elements, or masks, before reaching the...

In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit material onto substrates, creating patterns or structures with precise...

A lithography method that allows the transfer of fine-pitch gratings from a phase mask into photoresist. The exposure takes place with the light coming under an oblique angle to the mask. The...

The use of retroreflective projection technology (RPT) to project a background image onto a masked object, such as a vehicle or overcoat, thereby making the masked object appear invisible....

In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...

In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...

A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....

The underexposure caused by the diffraction of light passing through small openings spaced closely together in masks used in photolithography.

Single-molecule Förster resonance energy transfer (smFRET) is a specialized technique in biophysics and molecular biology used to study the distances and dynamic interactions between two...

A tiny lens (as small as 100 µm in diameter) used to focus light on charge-coupled devices, formed by heating a photosensitive material exposed through a mask, leaving a pattern of raised...

Zerodur is a type of glass ceramic material known for its exceptional thermal and mechanical properties, particularly its low coefficient of thermal expansion (CTE) close to zero. It was developed by...