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6 terms
Definitions: P
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photolithography x
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photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...
phase mask
In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it. The phase mask is used to control the spatial distribution of the light's...
photoemulsion
In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.
photomask
A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...
photoresist
Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....
proximity effect
The underexposure caused by the diffraction of light passing through small openings spaced closely together in masks used in photolithography.
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