Photonics Dictionary

Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the UV-A and UV-B regions. The exact wavelength range considered as DUV can...

Epitaxial equipment refers to a set of specialized tools and systems used in the process of epitaxy, which is the growth of crystalline layers on a substrate material. Epitaxial growth is a critical...

Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which...

Laser annealing is a process that involves using a laser beam to heat and modify the microstructure of a material, typically a thin film or surface layer, with the objective of improving its...

Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of...

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...

A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in semiconductor manufacturing and other areas of microfabrication. It is a high-precision...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....

A probe card is a testing device used in the semiconductor manufacturing industry to evaluate and test the electrical characteristics of integrated circuits (ICs) on a wafer. Its primary function is...

Sapphire crystal refers to a transparent, single-crystal form of aluminum oxide (Al2O3) known as corundum. It is one of the hardest known materials, second only to diamond on the Mohs scale of...

A crystal, glass, or quartz slicing and cutting machine is a specialized piece of equipment used in the manufacturing process to precisely cut and slice materials such as crystals, glass, and quartz...

Sputtering equipment is machinery used in the process of physical vapor deposition (PVD), specifically sputtering. Sputtering is a method of depositing thin films of material onto a substrate surface...

A substrate refers to a material or surface upon which another material or process is applied or deposited. In various fields, such as electronics, biology, chemistry, and manufacturing, the term...

In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a semiconducting material, usually crystalline silicon. Wafers serve as the...