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Scatterometers

A scatterometer is an instrument used to determine the absolute or relative scatter levels of optical surfaces.

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MICROTECH srl - Palermo, Italy
Glossary
  • scatterometer An instrument used to determine the absolute or relative scatter levels of optical surfaces.
  • scatterometry A measurement technique used for the rapid quantitative evaluation of surface quality based on the detection and analysis of light scattered from the surface.
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