Abbreviations/Acronyms

acousto-optic beam deflector

beam-delivery system

beam utilization factor

chemical-assisted ion-beam etching

electron beam

electron-beam accessed memory

electron-beam coating

electron-beam electroreflectance

electron-beam-exposure system

electron-beam-induced current

electron-beam recording

electron-beam tomography

fast atom beam

focused ion beam

holographic beam sampler

high energy beam sensitive

ion-beam-assisted deposition

inert ion-beam etching

ion-beam sputtering

laser-beam-induced current

laser beam printer

molecular beam epitaxy — A well-controlled thin film technique for growing films with good crystal structure in ultra high vacuum environments at very low deposition rates. MBE is also commonly used in the manufacture of semiconductor devices and solar cells.

metallorganic molecular beam epitaxy

operational laser beam recorder

polarization beam combiner

return beam vidicon

reactive ion-beam etching

torque motor-beam steerer