- Model: Photodetector - SXUV100TF135
- Company: Opto Diode Corporation
- Type: Other
- Light Spectrum: UV
- Active Area: 100 mm²
- Low Capacitance: 260 pF
- Reverse Bias Voltage: 12V
Directly deposited thin-film filters are ideal for detection between 12 nm and 18 nm, with typical responsivity of 0.09 A/W at 13.5 nm. Used in laser power monitoring and semiconductor photolithography, and metrology systems that utilize extreme ultraviolet light.
1260 Calle Suerte
Camarillo, CA 93012
United States
Phone: +1 805-499-0335
Fax: +1 805-499-8108