- Model: EUV Multilayer Mirrors
- Company: NTT Advanced Technology Corp.
- Type: Mirrors
- Diameter / Dimension: 5mm - 300mm
- Applications: Astronomy, Biomedical/Medical, Industrial, Scientific Research
- Substrate Roughness: ≤0.3 nm rms
- Surface Figure: ≤ 1/10 wave
- Effective Area: ≥90%
- Wavelength Region: 8 nm ~ 50 nm
Reflectivity: 35% @ 8 nm, 68% @ 13.5 nm, 46% @ 30 nm
Coating Material: Ru/B4C, Mo/Si, Zr/AlSi, SiC/Mg
Surface Figure: <1/10 wave (flat, spherical, concave) <1 wave (ellipsoidal, parabolic)
Tokyo Opera City Tower
3-20-2, Nishi-shinjuku
Shinjuku, Tokyo 163-1436
Japan
Phone: +1 408-474-0214