Metrology gauges
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
PI (Physik Instrumente) LP has announced the D-510
family of PISeca capacitive displacement gauges for nanometrology applications.
They perform high-precision, noncontact measurements of geometric quantities representing
displacement, separation, position, length or other linear dimension against any
kind of electrically conductive target. The single-probe sensors achieve subnanometer
resolution and can measure ranges of up to 500 μm at a bandwidth up to 10 kHz.
A guard-ring electrode shields the sensor electrode from boundary effects, providing
a homogeneous electric field in the measurement zone and linearity of up to 0.1
percent. The systems can be operated in multichannel configurations.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: December 2006
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