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Fiber Laser

Coherent Inc.

SANTA CLARA, Calif., Dec. 17, 2013 — The Daytona-HE, a short-pulse, UV fiber laser from Coherent Inc., delivers 355-nm output with peak powers >45 kW (at repetition rates up to 525 kHz) and high pulse energies >70 µJ (at up to 325-kHz repetition rate).

It produces nanosecond and shorter pulses, and, combined with TEM00 mode quality of M²<1.3, enables precision micromachining of a range of semiconductors, glasses, organics, metals and other materials. It can be adjusted over a broad operating range to match the needs of a particular application; e.g., pulsewidth can be adjusted from <1 to 20 ns, while repetition rate can go from single shot to <2 MHz.

Applications include wafer dicing, scribing and drilling (especially with low-κ materials), glass scribing for touch panels and LCDs, touch-screen patterning and thin-film scribing for photovoltaics (solar) manufacturing.


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