JetStep Panel Lithography System
Rudolph Technologies Inc.Request Info
Rudolph Technologies Inc.’s JetStep panel lithography system can process both glass and organic laminate panels for applications in semiconductor advanced packaging.
The system combines LCD manufacturing with on-the-fly autofocus for thick photoresists, an onboard reticle library and a 6-s reticle change-out wheel. It is compatible with the company’s suite of software products, including ProcessWORKS for run-to-run control, Discover for yield management, and ARTIST for fault detection and classification.
http://www.rudolphtech.com
/Buyers_Guide/Rudolph_Technologies_Inc/c12952
Published: July 2013
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