Copper-ceramic lightweight mirrors suitable for use in CO2 laser machine tools with linear motor drives have been developed by Kugler GmbH. The mirrors consist of two ceramic plates with 0.3-mm copper foil sandwiched between them. A mirror with a diameter of 70 mm and a thickness of 6 mm weighs 130 g and can be used in laser systems with power higher than 5 kW. Features include a 3-D cooling circuit that cools directly behind the surface, durable connection of all layers, optimum heat transfer and high mirror stiffness. The mirror's surface has a p-v flatness of ≤ 500 nm and a roughness of ≤ 5 nm. Coatings are available to protect the mirror and to enhance its reflectivity.