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MICRO-OBJECTIVES

Photonics Spectra
Nov 2001
Corning Tropel Corp.Request Info
 
Corning Tropel Corp. has introduced the µCat line of deep-UV micro-objectives with a working distance of up to 9 mm for inspecting images printed on wafers and photomasks. The Tiger, Panther and Cheetah micro-objectives are available off the shelf in standard specifications. The catadioptric devices incorporate refractive and reflective elements, allowing designers to manipulate surface curves, element thickness and glass type for optimum lens performance. They have NAs ranging from 0.52 to 0.90 and low central obscuration. The internal atmosphere of each objective is controlled, preventing contaminants from depositing or photopolymerizing on internal components.


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