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UV MICROSCOPE FOR DEFECT ANALYSIS

Photonics Spectra
Sep 1997
Carl Zeiss Microscopy LLCRequest Info
 
Carl Zeiss Inc. is offering its Axiotron 2 UV microscope, which was designed for quality control and defect classification of structures below 0.25 µm. The company says the device is the first of its kind to feature deep-UV imaging. It is optimized for 365-nm I-line and 248-nm deep-UV analysis. A cooled, high-resolution CCD camera captures the images at high magnification and high spatial resolution. A high-resolution scanning stage then allows the user to position at the defect sites with the help of navigation software. Also included are the Zeiss DUV Ultrafluar 1003/0.9 and two dedicated Ultrafluar 1003/1.2 objectives. Resolution is less than 0.03 µm/pixel on the wafer.


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