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WAFER MEASUREMENT

Photonics Spectra
Jan 2002
Cascade Microtech Inc.
 
A measurement solution for edge-emitting laser bars and discrete devices has been developed by Cascade Microtech Inc. This system uses optical fiber probes and large-area photodiodes along with the company's RF and DC probes and probe stations. It enables wavelength, bit-error- rate, front- and back-side power, high-frequency S-parameter and LIV measurements at precisely controlled temperatures. The system can be configured with a transparent optical chuck for access to both sides of photodiode and VCSEL wafers. The lightwave probe, available in vertical and horizontal orientations, enables characterization of on-wafer and in-module devices.


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