Nikon Instruments Inc. offers a fully automated inspection microscope that allows recipe programming of such functions as optical technique, aperture position and Z-axis height. The Eclipse L200A IC has an RS-232 port for communication with the motorized stages, wafer loaders, autofocus modules and software. Other automated functions allow users to control the light path, lamp intensity and movement of the six-place nosepiece. The microscope can view, image and document wafers with diameters up to 8 in. and photomasks up to 6 in. It can be used independently or paired with a wafer loader.