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157-nm FLUORINE LASER

TuiLaser AG

TuiLaser AG offers the ExciStar M 157-nm fluorine laser suitable for downscaling devices in microelectronic chip manufacturing. This UV light source also can be used for photo-ionization, spectroscopy, lithography and other industrial and biomedical applications. The fluorine laser delivers repetition rates up to 100 Hz, maximum energy of up to 15 mJ, an average power of >1.4 W and hands-free operation for a typical lifetime of 120 million pulses. The laser tube design reduces gas corrosion and contamination while increasing the tube lifetime. The company says the laser provides unsurpassed accuracy and lower ablation thresholds for machining materials such as quartz and PTFE. The ExciStar M has a series of automated check systems and gas-handling routines for safe operation.


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