Search
Menu
AdTech Ceramics - Ceramic Packages 1-24 LB

KrF LIGHT SOURCE

Facebook X LinkedIn Email
Request Info
Cymer Inc.
A krypton fluoride production light source for use in semiconductor manufacturing has been unveiled by Cymer Inc. The ELS-7000 is designed for next-generation lithography applications at 248 nm and provides a repetition rate of 4 kHz and output power of 30 W. The light source also offers variable energy and repetition rate operation for increased process latitude; the MicroInject, for minimized operational downtime; and high-accuracy tuning technology for wavelength stability. The ELS-7000 is suitable for use with 200- and 300-mm lithography scanners whose lenses have numerical apertures of...See full product

Related content from Photonics Media



    PRODUCTS


    ARTICLES


    PHOTONICS HANDBOOK ARTICLES


    WHITEPAPERS


    WEBINARS


    PHOTONICS DICTIONARY+ TERMS


    VIDEOS


    PHOTONICS BUYERS' GUIDE CATEGORIES


    COMPANIES


    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.