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SCANNING MICROSCOPE

Photonics Spectra
Oct 2002
JEOL USA Inc.Request Info
 
Nanometer-scale imaging is provid-ed by JEOL USA Inc.'s JSM-7400F scanning electron microscope. The device achieves 1.5-nm resolution at 1 kV. It features a patented scanning electron enhancer for improved contrast quality of surface structures, an r-filter for suppressing the electron charge on nonconductive specimens and an in-lens backscatter detector. Flexible analytical geometry enables a working distance of 8 mm at a takeoff angle of 35°. Load lock options allow coverage of samples up to 100, 150 or 200 mm in diameter, and three motorized eucentric stages with five-axis automation provide traverse ranges of 70 x 50 mm, 110 x 80 mm and 140 x 80 mm.


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