WAFER PARTICLE DETECTOR
Nov 2002Rudolph Technologies Germany GmbHRequest Info
The Reflex 200/300 laser surface analyzer from NanoPhotonics detects and differentiates particles, area defects, haze and scratches on nonpatterned wafers. It provides particle and haze maps, particle and haze histograms, and particle size distribution and reflectivity measurements. The manual-load system accommodates wafers up to 300 mm. The enclosed measurement head and wafer enable Class 10 operation in a Class 1000 environment for lab and equipment test applications. The company also offers a version for integration into process equipment.