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DEFECT DETECTION

Photonics Spectra
Feb 2003
Carl Zeiss Microscopy LLCRequest Info
 
Carl Zeiss Jena GmbH introduces the DeepView module, which can be used with its Axioskop 2 mat microscope. The module is designed to provide extended depth of focus with conventional light microscopes for the development and production of MEMS components with depth-extended structures. It detects defects in microsystems, including acceleration sensors, actuators and microswitches. The company says that the structures and their entire depth can be visualized in quasi-real time without refocusing and that this technique is not as time-consuming as laser scanning microscopy.


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