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193-nm OPTICS

Photonics Spectra
Jun 2003
Alpine Research OpticsRequest Info
 
193-nm OPTICS High-performance 193-nm optics have been announced by Alpine Research Optics. The CaF2 components are suitable for laser applications such as microlithography, micromachining and lasik. Mirrors, partial reflectors and windows for 0° and 45° operation are available, as well as a range of spherical and cylindrical lenses. The lenses and windows have a radius of curvature between 0.05 and 10 m, and can be produced in diameters up to 75 mm. The company says the optics provide long lifetimes and high damage thresholds when used with high-fluence, high-repetition-rate excimer lasers.


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GLOSSARY
microlithography
A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
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