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THIN-FILM DEPOSITION

Photonics Spectra
Sep 2003
INFICONRequest Info
 
Inficon The Cygnus thin-film deposition controller is designed to enhance the process capability of organic LED applications in flat panel display manufacturing. Released by Inficon, the instrument controls the ratios of up to six materials independently or in any combination, with a rate resolution of 0.01 Å/s. Flexible deposition sequencing allows continuous rate control and saves production time as substrates are cycled through the system. The controller features a thickness-summing function, an I/O configuration that provides process control integration and up to three digital-to-analog outputs per source.


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