WAFER POSITIONING
MKS/NewportRequest Info
Newport Corp. has launched its 300-mm air-bearing wafer positioning system, which the company says offers high throughput and flexibility through six axes of precision motion control, including an integrated three-axis tip/tilt stage. DynamYX GT's stage is made of silicon carbide for stability, density and strength. A large monolithic single-plane architecture provides flatness, straightness and good pitch, yaw and roll control for positional accuracy. The low-profile design reduces the center of mass and minimizes the potential for error from deflection or angular deviation. The pressure vacuum system maintains a constant fly height during acceleration.
https://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: October 2003
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