Dec 2003Adept Technology Inc.Request Info
The Apex EFEM wafer-handling module for semiconductor process tools from Adept Technology Inc. combines the company's direct-drive Award robot and its SmartServo FireWire-based distributed controls architecture. It accommodates wafer sizes of up to 300 mm, configurable with any combination of open cassette, SMIF or FOUP load ports. The SEMI-compliant package supports vacuum and edge-grip end effectors, through-beam wafer mapping, wafer alignment and identification, and contamination controls. The robot's amplifier electronics are built into its base for reduced wiring and simpler installation and maintenance.