WAFER, FILTER INSPECTION
Jan 2004Olympus Soft Imaging Solutions Corp.Request Info
Soft Imaging System Corp. has introduced image analysis software for inspecting blank wafers and circular filters. AnalySis waferInspec-tor and analySis filterInspector
perform fully automatic and fast analysis, classification and documentation of contamination and defects on residues and coatings. Special cameras and motorized stage controllers enable characterization of a 50-mm-diameter filter in 15 min, with 0.8-µm resolution. Inspection parameters are user-selected, and a report containing measurement results, histograms and sample data is generated and saved in the database. Wafer and particle maps also are generated, and a digital rendering of each wafer is saved.