Jan 2004Structured Materials Industries Inc.Request Info
Structured Materials Industries Inc. has launched a plasma-enhanced
static metallorganic chemical vapor deposition system and reactor for thin-film deposition on 150-, 200- and 300-mm wafers. Available as a stand-alone R&D system and as a cluster tool module, it complements the company's family of rotating disk Spin CVD and tape reactors. Applications include waveguides, amplifiers, dielectrics, piezoelectrics, pyroelectrics, ferroelectrics, optical coatings, electro-optics, chemical sensors, silicides, carbides, nitrides and MEMS.