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HIGH-PRECISION MIRRORS

Photonics Spectra
Feb 2004
New FocusRequest Info
 
High-Precision Mirrors New Focus Inc. has introduced a line of high-precision mirrors for excimer-laser-based applications in the UV and the deep-UV, including semiconductor manufacturing, metrology, lithography and micromachining. The high-reflectivity 45° turning mirrors include models 5106 and 5136, which are available at 363 nm and have diameters of 1 and 1.5 in., respectively; models 5128 and 5129 have a 2-in. diameter and are available at 248 and 193 nm, respectively. The optics are ground, polished and coated in a single, environmentally isolated area and are virtually free of contamination. E-beam and ion-assisted deposition coating minimize stress at the coating interface.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
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