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LED LIFT-OFF

Photonics Spectra
May 2004
IPG Photonics, Microsystems Div.Request Info
 
LED LIFT-OFF For LED lift-off applications in the compound semiconductor and wafer fabrication industries, JPSA Laser has unveiled its IX-1000 ChromaLift. The excimer laser system enables the manufacturer to grow GaN LED thin-film devices on the sapphire wafer and then transfer them to a heat sink electrical interconnect, eliminating the wafer scribing step. The system homogenizes the laser beam profile and fires through the back of a sapphire wafer to debond the GaN LED device and to transfer it to a substrate where it can be packaged onto a heat sink and/or an optical reflector. The system includes PC-controlled power meters, a beam profilometer and Windows 2000 software. Area per shot is up to 1 × 1 cm, in either step-and-repeat or fire-on-the-fly mode.


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GLOSSARY
compound semiconductor
A semiconductor made up of two or more elements, in contrast to those composed of a single element such as germanium or silicon. In a III-V semiconductor, for example, one or more elements having three valence electrons (gallium, for instance) are combined with one or more having five (arsenic).
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
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