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AUTO MEASUREMENT

Photonics Spectra
May 2004
Olympus Soft Imaging Solutions Corp.Request Info
 
A software extension for Soft Imaging System Corp.'s analySIS software enables wafer and lithography mask navigation. Dubbed WaferNavigator, it expands the functions of a scanning electron microscope. It can be integrated at any die measurement to allow the user to define wafer geometry regarding size, number, position and condition of the dies or chips. Besides the interactive selection of die positions, the software offers an automated mode. Users can conduct simple measurements, such as line-width, or complex measurements and/or routines, such as image acquisition and archiving or report generation, at each stage position.


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GLOSSARY
wafer
A cross-sectional slice cut from an ingot of either single-crystal, fused, polycrystalline or amorphous material that has refined surfaces either lapped or polished. Wafers are used either as substrates for electronic device manufacturing or as optics. Typically, they are made of silicon, quartz, gallium arsenide or indium phosphide.
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