A software extension for Soft Imaging System Corp.'s analySIS software enables wafer and lithography mask navigation. Dubbed WaferNavigator, it expands the functions of a scanning electron microscope. It can be integrated at any die measurement to allow the user to define wafer geometry regarding size, number, position and condition of the dies or chips. Besides the interactive selection of die positions, the software offers an automated mode. Users can conduct simple measurements, such as line-width, or complex measurements and/or routines, such as image acquisition and archiving or report generation, at each stage position.