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MOLECULAR BEAM EPITAXY

Photonics Spectra
Aug 2004
Veeco Instruments Inc.Request Info
 
A molecular beam epitaxy system for materials research and test production of compound semiconductors has been released by Veeco Instruments Inc. The Gen20 system, which has a manual wafer transfer system, features a modular platform that allows simple transition to a fully automated cluster tool. It can be used with one 4-in. or three 2-in. wafers and can be tailored to various materials and applications. The growth chamber includes a proprietary LN2 phase separator for thermal isolation.


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