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SPECTROMETER

Photonics Spectra
Nov 2004
LTB Lasertechnik Berlin GmbHRequest Info
 
Lasertechnik Berlin GmbH has developed the Elias III spectrometer jointly with the Institute for Spectrochemistry and Applied Spectroscopy Berlin. The echelle device quantitatively analyzes the wings and spectral vicinity of the laser lines and measures a minimum linewidth of 20 fm FWHM at 193 nm. It is suitable for spectral characterization of 248-, 193- and 157-nm excimer lasers in microlithography, and for atom absorption spectroscopy and laser diode development.


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GLOSSARY
microlithography
A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
spectrometer
A kind of spectrograph in which some form of detector, other than a photographic film, is used to measure the distribution of radiation in a particular wavelength region.  
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