The JAMP-9500F scanning Auger microprobe for high-resolution surface analysis of microareas from JEOL USA Inc. is suitable for identifying killer defects in interfaces and for analyzing coatings and composites. It achieves minimum probe diameters of 3 and 8 nm for secondary electron imaging and Auger imaging, respectively. Features include a neutralizing ion gun, a tilting specimen stage and a low-aberration objective lens. It incorporates a hemispherical energy analyzer that can vary energy resolution from 0.05% to 0.06%, and it can analyze smaller features of larger samples of up to 95 mm in diameter. The device can be used for electron back-scattered diffraction observation of electron channeling patterns without contamination as well as for low-accelerating voltage energy dispersive x-ray spectrometer analysis.