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IMPRINT LITHOGRAPHY

Photonics Spectra
Apr 2005
Molecular Imprints Inc.Request Info
 
IMPRINT LITHOGRAPHY Imprio 250, an imprint lithography system, has been launched by Molecular Imprints Inc. Providing sub-50-nm half-pitch resolution, sub-10-nm alignment and integrated magnification control, the device includes fully automated wafer-handling (up to 300 mm) and template-loading capabilities. The tool was built to industry standards around a platform using Step and Flash Imprint Lithography technology. It has an in-liquid alignment and magnification-control system for precision overlay for advanced applications.


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