MICROPOSITIONING, ALIGNMENT SYSTEM
Jun 2005PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
Designed to work in vacuum environments, the M-824 hexapod 6-D micropositioning and alignment system released by PI (Physik Instrumente) LP provides high-resolution motion in six degrees of freedom. It combines multiaxis motion to 45 mm/25° with submicron resolution and repeatability. Its parallel kinematics approach results in higher stiffness and minimized inertia for faster response and alignment. It measures 280 × 190 mm, has a 10-kg load capacity and is vacuum-compatible to 10−6 hPa. The software can change the center of rotation, and the absence of moving cables results in increased reliability and repeat-ability. Minimum incremental motion is 0.2 µm.