The programmable VACP200 and motorized VACM200 vacuum probe stations have been launched by The Micromanipulator Co. Integrated into a vibration isolation system, they are designed to probe up to 200-mm wafers, pieces, die or packaged parts. A laser-ready A-Zoom microscope with a 40× zoom body and a 10× long-working-distance objective is included. The microscope, mounted on top of the vacuum chamber, holds the image steady relative to the sample. The automated chamber open/close evacuation feature provides easy access to and facilitates setup of the chamber. The station can be integrated with the company's thermal chuck system.