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TURBO PUMPS

Photonics Spectra
Aug 2005
Pfeiffer Vacuum Inc.Request Info
 
TURBO PUMPS Pfeiffer Vacuum Inc. has introduced high-capacity, high-throughput turbo pumps that are designed for high-particulate processes in semiconductor, glass, industrial coating and R&D applications. Pumping speeds range from 1200 to 2100 l/s for light gases, and throughput is up to two standard liters per minute for heavy gases. The rotor/bearing design results in mean time before failure of better than 200,000 h. The pumps use an integrated controller with interchangeable peripherals and cables and are available with IP54-rated power supplies in a variety of configurations.


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GLOSSARY
glass
A noncrystalline, inorganic mixture of various metallic oxides fused by heating with glassifiers such as silica, or boric or phosphoric oxides. Common window or bottle glass is a mixture of soda, lime and sand, melted and cast, rolled or blown to shape. Most glasses are transparent in the visible spectrum and up to about 2.5 µm in the infrared, but some are opaque such as natural obsidian; these are, nevertheless, useful as mirror blanks. Traces of some elements such as cobalt, copper and...
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