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EXCIMER LASER

Photonics Spectra
Dec 2005
Coherent Inc.Request Info
 
EXCIMER LASER The Lambda SX 315C manufactured by Coherent Inc. is an excimer laser designed to reduce cost and to improve yield and throughput in flat panel display manufacturing. Optimized for the low-temperature polysilicon crystallization used in the process, the laser combines up to 1050-mJ pulse energy and 0.5% pulse stability with 315 W of average power. Proprietary PowerLok and TimeLok technologies provide stable performance under all conditions. The device can perform excimer laser annealing and sequential lateral solidification, and its high and uniform mobility levels minimize threshold voltage variations of thin-film transistors to enable mass production of active-matrix organic LEDs. Real-time e-diagnostics facilitates predictive maintenance.


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GLOSSARY
excimer laser
A rare-gas halide or rare-gas metal vapor laser emitting in the ultraviolet (126 to 558 nm) that operates on electronic transitions of molecules, up to that point diatomic, whose ground state is essentially repulsive. Excitation may be by E-beam or electric discharge. Lasing gases include ArCl, ArF, KrCl, KrF, XeCl and XeF.
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