The Lambda SX 315C manufactured by Coherent Inc. is an excimer laser designed to reduce cost and to improve yield and throughput in flat panel display manufacturing. Optimized for the low-temperature polysilicon crystallization used in the process, the laser combines up to 1050-mJ pulse energy and 0.5% pulse stability with 315 W of average power. Proprietary PowerLok and TimeLok technologies provide stable performance under all conditions. The device can perform excimer laser annealing and sequential lateral solidification, and its high and uniform mobility levels minimize threshold voltage variations of thin-film transistors to enable mass production of active-matrix organic LEDs. Real-time e-diagnostics facilitates predictive maintenance.