Dec 2005PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) LP is offering monolithic high-speed nanopositioning stages that achieve resolution of <0.1 nm and response of up to 3 kHz resonant frequency in a package that is smaller than a matchbox. High-precision direct metrology capacitive sensors are integrated for higher linearity. The flexure-guided design provides zero-friction motion with optimum straightness and flatness. The stages are equipped with an ID chip that holds all calibration data and sends it to the digital controller, and are driven by Picma ceramic-encapsulated piezo drives for high reliability and increased lifetime.